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> Hot Stages.
Substrate
rotation - Substrate heating - Substrate RF & DC bias - Z-Shift
- Quick release wafer holder - Water cooled
Our standard hot stage, shown below, is mounted on a CF40 flange
and includes: stage rotation, quick release substrate holder,
substrate heater (1000C element temperature, 700C substrate
temp), RF / DC stage bias, water cooled outer heat shields and
Z-shift movement for wafer transfer. Our standard substrate
sizes are 4", 5" and 6", but we can accommodate any size as a
special. Our standard hot stage mounts onto a CF40 flange, but
we specialise in producing bespoke hot stages, and can modify
our standard hot stage design to suit any flange size. Although
our full hot stage includes rotation, RF / DC substrate bias,
substrate heating with water cooled heat shields, quick release
substrate holder and Z-shift movement, our stages can be
configured to suit our customers specific requirements. It is
therefore possible to specify just the components of the hot
stage that are required, from for example a very basic hot stage
with just rotation and heating, or static stage with heating and
RF/DC bias, or any other combination. Our stages are fully
shielded and insulated and fitted with an N type coaxial
connector, enabling a DC bias or RF bias to be applied to the
substrate platen. This bias can be run prior to deposition, for
substrate cleaning / light etching, or during deposition to
modify film properties. For very simple static hot stages our
ceramic topped elements are most suitable. Please refer to our
ceramic topped elements page for more details on designs and
configurations.
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If high
element temperatures in excess of 1000C are required, then a high
temperature version of our standard hot stage is required. This high
temperature hot stage has a graphite element, and requires larger power
feedthroughs to cope with the high current load that the graphite
element requires. Our graphite elements are limited to 500C if O2 is
present, but a special SiC coated graphite element can be used if O2
compatibility is required.
We also produce bespoke
very high temperature furnaces for heating small samples up to 2000C.
These vacuum and inert atmosphere furnaces have an all graphite hot
stage and so are not suitable for use with O2 above 500C. The furnace
heats a graphite crucible, i.d.60.50mm x 80mm, to 2000C. The furnace is
vertically orientated with the crucible loaded from the top. The main
chamber body and all flanges and power feedthroughs are water cooled
enabling long operation at maximum temperature without overheating.
To power and control our
hot stage heaters and our vacuum furnaces, we have developed a range of
heater temperature controllers and power supplies. Details of these are
shown below.
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Heater Controllers and Heater Power Supply |
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Our range of
heater controllers and power supplies offer the complete
solution to powering and controlling every possible kind of
heating element. All our controllers are fitted with a
Eurotherm 2216e PID temperature controller which enables the
heater to be held at exactly the set temperature. A tuning
facility enables the controller to accurately tune to the
heaters requirements and therefore avoid overshooting during
temperature ramping. The control enables ramping and cooling
between two set points at a specified ramp rate. The heater
controller can also be controlled remotely and integrated in
system computer control programs via modbus RS232, RS485 and
other protocols.
All our heater
controllers have power on / off switch to the whole unit,
and an output enable switch to isolate the output from the
controller. A 24v interlock circuit is also included to
enable the power supply to be integrated with interlocks
into other systems, or safety interlocks to be attached
directly to the unit; which will switch off the output from
the unit if the circuit is broken. This enables safety
interlocks via make / break switches for things such as
chamber lids closed, vacuum interlocks, cooling water flow,
over temperature sensors etc.
Our standard
units are 50v or 115v burst-fire output (240v x 13 amp 50hz
input). The 1kw unit is available in 3U x full 19" wide rack
mount, or 3U half rack mount both with integrated transformer.
Our 1.5kw unit is available in 3U half rack mount only.
Above 1.5kw a
separate transformer box is required. These units can be
supplied with burst-fire thyristor or phase angle control
thyristor which is more suitable for graphite elements. |
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