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> Ceramic Topped In Vacuum Substrate Heaters.
Ceramic topped in vacuum substrate heaters are suitable for
sample heating in high vacuum or inert or oxidising atmospheres.
These versatile substrate heaters can be used in any
orientation, as a stand alone in vacuum substrate heater, or
integrated into a hot stage with substrate rotation, Z-shift
movement and RF or DC substrate bias. They are very commonly
supplied integrated onto their own base flange including power
and thermocouple vacuum feedthroughs. The ceramic topped
substrate heater is designed to mount onto the base flange but
be small enough to clear the bore of the port, allowing the
sample heater to be introduced into the vacuum chamber fully
assembled.
Samples can be placed directly onto the ceramic face of the
substrate heater, or onto a substrate holder in front of the
heater. The ceramic topped substrate heater can be supplied with
a solid face, or with a central hole to allow a stage shaft to
pass through, and rotate the substrate close to the ceramic
heater face. Alternatively the ceramic topped substrate heater
can be supplied on a 1" shaft, and the whole heater can
rotate, with the sample attached to the face.
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The
ceramic topped substrate heater can be supplied with two types of
element. The most common and cost effective is with a NiCr filament
potted into a ceramic holder. This enables the element to reach a
maximum of 1000C in high vacuum or inert or oxidising atmospheres. If
your in vacuum substrate heating needs require greater temperatures than
1000C, then a graphite element can be fitted to enable element
temperatures of up to 1800C (in vacuum or inert atmosphere, 500C with O2
present (graphite element)). The ceramic topped substrate heater does not have any problem
operating where a large amount of deposition product is present. It is
very well shielded to ensure that deposition of conducting materials
will not short out the electrical connections within the heater.
Ceramisis has produced purpose built sample heater controllers to power
and control these heaters.
Heater design selection guide
The following guide is an aid to
selecting the correct design of ceramic topped in vacuum substrate heater to
suit your requirements. It also gives an indication of the power requirements
for each of the size of NiCr element (graphite element requirements are totally
different). This is only a guide as power requirements can vary according to
conditions. These designs are our standard most cost effective designs using a
NiCr filament, where
only the support length and mounting method needs to be specified to enable us
to quote a price. We can also offer bespoke designs
if required.
If temperatures above 1000C
(element temp) are required then a graphite or refractory metal element will
have to be used instead of NiCr. Designs will therefore vary from those shown
below, depending on maximum temperature required, but the designs below can be
used as a starting point for your enquiry.
Please do not hesitate to contact us if you require more help with
design selection.
>Download heater
selection guide in pdf.(227k)
Base flange mounted with
central power & type K t/c vacuum feedthrough, on tubular support.
|
ØA - Hot
Zone |
ØB -
Heater o.d. |
C -
Length |
Base
flange |
Tube Ø |
D -
Heater thickness |
E -
Collar thickness |
Voltage -
Max |
Current -
Max |
Temperature - Max |
|
51mm (2") |
58mm |
Custom |
Custom |
1" o.d. |
16.5mm |
17mm |
115
volts |
4 amps |
1000C |
| 77mm
(3") |
84mm |
Custom |
Custom |
1" o.d. |
16.5mm |
17mm |
115
volts |
6 amps |
1000C |
| 102mm
(4") |
110mm |
Custom |
Custom |
1" o.d. |
22mm |
17mm |
115
volts |
13 amps |
1000C |
| 127mm
(5") |
133mm |
Custom |
Custom |
1" o.d. |
22mm |
17mm |
115
volts |
14.5
amps |
1000C |
| 153mm
(6") |
158mm |
Custom |
Custom |
1" o.d. |
22mm |
17mm |
115
volts |
14.5
amps |
1000C |
| 178mm
(7") |
185mm |
Custom |
Custom |
1" o.d. |
22mm |
17mm |
115
volts |
14.5
amps |
1000C |
| 229mm
(9") |
240mm |
Custom |
Custom |
1" o.d. |
22mm |
17mm |
115
volts |
17 amps |
1000C |
For temperatures over 1000C (up
to 1800C max) designs will vary but be loosely based around the above designs.
Element only mounted on M6 stud or 3
legs, with in vacuum power leads and ceramic beaded type K thermocouple.
|
ØA - Hot Zone |
ØB - Heater o.d. |
C - Length |
D - Heater thickness |
ØE - Heatshield o.d. |
F - Shield thickness |
Stud or Leg mount |
Voltage - Max |
Current - Max |
Temperature - Max |
|
53mm (2") |
58mm |
Custom |
16.5mm |
63mm |
22.5mm |
M6 stud |
115 volts |
4 amps |
1000C |
|
78mm (3") |
83mm |
Custom |
16.5mm |
93mm |
22.5mm |
M6 stud |
115 volts |
6 amps |
1000C |
|
106mm (4") |
111mm |
Custom |
22mm |
121mm |
28mm |
Both |
115 volts |
13 amps |
1000C |
|
129mm (5") |
134mm |
Custom |
22mm |
144mm |
28mm |
Both |
115 volts |
14.5 amps |
1000C |
|
154mm (6") |
159mm |
Custom |
22mm |
169mm |
28mm |
Both |
115 volts |
14.5 amps |
1000C |
|
178mm (7") |
183mm |
Custom |
22mm |
193mm |
28mm |
Both |
115 volts |
14.5 amps |
1000C |
|
236mm (9") |
241mm |
Custom |
22mm |
251mm |
28mm |
Both |
240volts |
17 amps |
1000C |
Please specify if power leads
and thermocouple are to exit from the side or the rear of the element.
For temperatures over 1000C (up
to 1800C max) designs will vary but be loosely based around the above designs.
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Heater Controllers and Heater Power Supply |
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Our range of
heater controllers and power supplies offer the complete
solution to powering and controlling every possible kind of
heating element. All our controllers are fitted with a
Eurotherm 2216e PID temperature controller which enables the
heater to be held at exactly the set temperature. A tuning
facility enables the controller to accurately tune to the
heaters requirements and therefore avoid overshooting during
temperature ramping. The control enables ramping and cooling
between two set points at a specified ramp rate. The heater
controller can also be controlled remotely and integrated in
system computer control programs via modbus RS232, RS485 and
other protocols.
All our heater
controllers have power on / off switch to the whole unit,
and an output enable switch to isolate the output from the
controller. A 24v interlock circuit is also included to
enable the power supply to be integrated with interlocks
into other systems, or safety interlocks to be attached
directly to the unit; which will switch off the output from
the unit if the circuit is broken. This enables safety
interlocks via make / break switches for things such as
chamber lids closed, vacuum interlocks, cooling water flow,
over temperature sensors etc.
Our standard
units are 50v or 115v burst-fire output (240v x 13 amp 50hz
input). The 1kw unit is available in 3U x full 19" wide rack
mount, or 3U half rack mount both with integrated transformer.
Our 1.5kw unit is available in 3U half rack mount only.
Above 1.5kw a
separate transformer box is required. These units can be
supplied with burst-fire thyristor or phase angle control
thyristor which is more suitable for graphite elements. |
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